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Elemental Fractionation Studies of 193 nm ArF Excimer Laser Ablation System at High Spatial Resolution Mode

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Year:
2016
Type of Publication:
Article
Keywords:
Laser ablation-inductively coupled plasma-mass spectrometer
Authors:
WU, Shi-Tou; WANG, Ya-Ping; XU, Chun-Xue; YUAN, Ji-Hai
Journal:
Chinese Journal of Analytical Chemistry
Volume:
44
Number:
7
Pages:
1035 - 1041
ISSN:
1872-2040
BibTex:
Abstract:
Abstract The limit of detection (LOD), \{ICP\} mass load effect, downhole induced fractionation and matrix effect of 193 nm ArF excimer laser ablation system at high spatial resolution were systematically investigated. Trace elements in GSD-1G, StHs6/80-G and \{NIST612\} were measured at 10 μm spot size. The results showed that the \{LOD\} decreased with the increasing ablation diameter. In addition, the \{LOD\} of part of trace elements was in a range of 1–10 μg g−1 at 7 μm spot size. Mass load effect was negatively correlated with the corresponding oxide melting temperature, while positively correlated with the elemental 1st ionization potential. Downhole fractionation was negligible when the ratio of ablation depth to spot size was smaller than 1:1. Matrix effect between NIST610, GSD-1G, ATHO-G and StHs6/80-G did not change in the spot size ranged from 10 μm to 50 μm. The analytical results of GSD-1G, StHs6/80-G and \{NIST612\} at 10 μm spot size matched well with the reference values. Generally, 10 μm spatial resolution could satisfy the requirements of trace elements analysis.

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